Optoelectronic Fabrication Laboratory (OFL)

University of California, San Diego

 

 

Principle Investigators: Professor Sadik C. Esener and Professor Shaya Fainman

OFL Administrator:  Aaron L. Birkbeck (alb@ucsd.edu)

 

Welcome to the OFL information webpage!

 

The Optoelectronic Fabrication Laboratory at UCSD is located in the Engineering Building Unit 1 (EBU1) which is part of the Jacobs School of Engineering.  The core of the OFL facility is located on the first floor of EBU1, occupying rooms 1507 (clean room), 1509, 1511, 1513, 1515, and 1515A (clean room).  To find out more information about the OFL or to request access to the facility, please contact the OFL Administrator listed above.

 

OFL Standard Operating Procedures (SOP) Word 2000 Format Adobe Acrobat PDF

All OFL Users must be IIPP (Injury Illness Prevention Program) certified by EH&S and have completed the annual safety assessment tutorial for the current year.  To learn more about the IIPP program offered by EH&S you can go to the following website: http://enrollmentcentral.ucsd.edu  or for your annual lab safety certification: http://132.239.155.52/ehstutorial/login.html.

 

OFL Equipment and Machinery

Machine Identification Location Up-to-Date Status Operational Procedures
       
Photoresist spinner 1507 online <download now>
Karl Seuss MJB3 Mask Aligner 1507 online <download now>
HTG Mask Aligner 1507 online <download now>
A. Daigger Ultrasonic Cleaner 1507 online  
Fabrication ovens (x3) 1507 online  
Yamoto DN43 Constant Temp. Oven 1507 online  
Nikon Optical Microscope 1507 online  
IKA Labortechnik Hotplate / Stirrer 1507 online  
Semi Group 1000 MP PECVD 1509 offline <download now>
Semi Group 1000 MP RIE 1509 offline <download now>
CAIBE 1513 online <download now>
ALP 5500 Rapid Thermal Annealer 1515 offline  
Thermionics Thermal Evaporator 1515 online  
Thermionics Plasma Sputterer 1515 offline  
Thermionics E-Beam Evaporator 1515 online  
Tri-Mag Sputterer 1515 offline  
Kokusai VR-30A 4-Point Probe 1515A offline  
Prometrix RS55 Resistivity Mapper 1515A offline  
Photoresist spinner 1515A offline <download now>
Diamond Touch Wafer Dicer 3315 online  
Ecomet 5 Wafer Lapper / Polisher 3315 online  
Research Devices Flip-Chip Bonder 3315 online  
Kulicke and Soffa Wire Bonder 3315 online  
Shunadau UV240 Spectrophotometer 3317 online  
Corning 441 Conductivity Meter 3317 online  
Costar Microcentrifuge 3317 online  
AND HR-60GD Jewelry Balance 3317 online  
Dektak ST3 Profilometer 3508 online  
Scanning Electron Microscope (SEM) 3508 online  
Atomic Force Microscope (AFM) B902 online <download here>
FEI XL30 ESEM FEG B912 online