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Optoelectronic Fabrication Laboratory (OFL) University of California, San Diego
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| Principle Investigators: Professor Sadik C. Esener and Professor Shaya Fainman |
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| OFL Administrator: Aaron L. Birkbeck (alb@ucsd.edu) | |
Welcome to the OFL information webpage!
The Optoelectronic Fabrication Laboratory at UCSD is located in the Engineering Building Unit 1 (EBU1) which is part of the Jacobs School of Engineering. The core of the OFL facility is located on the first floor of EBU1, occupying rooms 1507 (clean room), 1509, 1511, 1513, 1515, and 1515A (clean room). To find out more information about the OFL or to request access to the facility, please contact the OFL Administrator listed above.
| OFL Standard Operating Procedures (SOP) | Word 2000 Format | Adobe Acrobat PDF |
All OFL Users must be IIPP (Injury Illness Prevention Program)
certified by EH&S and have completed the annual safety assessment tutorial for
the current year. To learn more about the IIPP program offered by EH&S you
can go to the following website:
http://enrollmentcentral.ucsd.edu
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OFL Equipment and Machinery |
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| Machine Identification | Location | Up-to-Date Status | Operational Procedures |
| Photoresist spinner | 1507 | online | <download now> |
| Karl Seuss MJB3 Mask Aligner | 1507 | online | <download now> |
| HTG Mask Aligner | 1507 | online | <download now> |
| A. Daigger Ultrasonic Cleaner | 1507 | online | |
| Fabrication ovens (x3) | 1507 | online | |
| Yamoto DN43 Constant Temp. Oven | 1507 | online | |
| Nikon Optical Microscope | 1507 | online | |
| IKA Labortechnik Hotplate / Stirrer | 1507 | online | |
| Semi Group 1000 MP PECVD | 1509 | offline | <download now> |
| Semi Group 1000 MP RIE | 1509 | offline | <download now> |
| CAIBE | 1513 | online | <download now> |
| ALP 5500 Rapid Thermal Annealer | 1515 | offline | |
| Thermionics Thermal Evaporator | 1515 | online | |
| Thermionics Plasma Sputterer | 1515 | offline | |
| Thermionics E-Beam Evaporator | 1515 | online | |
| Tri-Mag Sputterer | 1515 | offline | |
| Kokusai VR-30A 4-Point Probe | 1515A | offline | |
| Prometrix RS55 Resistivity Mapper | 1515A | offline | |
| Photoresist spinner | 1515A | offline | <download now> |
| Diamond Touch Wafer Dicer | 3315 | online | |
| Ecomet 5 Wafer Lapper / Polisher | 3315 | online | |
| Research Devices Flip-Chip Bonder | 3315 | online | |
| Kulicke and Soffa Wire Bonder | 3315 | online | |
| Shunadau UV240 Spectrophotometer | 3317 | online | |
| Corning 441 Conductivity Meter | 3317 | online | |
| Costar Microcentrifuge | 3317 | online | |
| AND HR-60GD Jewelry Balance | 3317 | online | |
| Dektak ST3 Profilometer | 3508 | online | |
| Scanning Electron Microscope (SEM) | 3508 | online | |
| Atomic Force Microscope (AFM) | B902 | online | <download here> |
| FEI XL30 ESEM FEG | B912 | online | |